用复合监控法镀制的TEA CO_2激光器增透膜  

Antireflect Film Used in TEA CO_2 Laser Produced by Combination Thickness Monitoring Method

作　　者：杨春华[1] 夏文建[1] 李蓬[1] 余文峰[1] 程祖海[1] 

机构地区：[1]华中科技大学激光技术国家重点实验室,武汉430074

出　　处：《光学与光电技术》2007年第1期75-78,共4页Optics & Optoelectronic Technology

基　　金：国家973资助项目;湖北省自然科学基金(2000j162)资助项目

摘　　要：比较了光学薄膜淀积过程中的晶振监控和光学监控各自的优缺点,提出了一种有效利用这两种监控方法各自优点的复合监控方法,利用该复合监控方法采用离子辅助镀工艺镀制的TEA CO2激光器增透膜,其透射率高于99.5%,且具有良好的稳定性和重复性。A combination thickness monitoring method is introduced to monitor optical thin film thickness in real time. The high accuracy of crystal oscillation monitoring method and the optical thickness measurement of turning point monitoring method can be used for real time monitoring on optical film deposition with high accuracy. Antireflection layers by IAD with this combination monitoring method show that the transmittance is more than 99.5 % at 10. 6 μm wavelength and the repeatability of film performance is improved.

关 键 词：光学薄膜 膜厚监控 复合监控 TEA CO2激光器 

分 类 号：O484.4[理学—固体物理]