金属与陶瓷阳极连接高压脉冲电源的设计  

The Design of High Voltage Pulse Power Applied in the Anodic Bonding between the Ceramics and Metals

作　　者：梁晋昌[1] 宋永刚[1] 秦会峰[1] 孟庆森[1] 

机构地区：[1]太原理工大学材料科学与工程学院,山西太原030024

出　　处：《机械管理开发》2007年第1期38-40,共3页Mechanical Management and Development

基　　金：国家自然科学基金(50375105);山西省自然科学基金(20031015)

摘　　要：设计了用于金属与陶瓷阳极连接的高压脉冲电源,并在该电源的基础上进行了K4玻璃/Si的阳极连接试验,该电源系统由高压直流工作电路、脉冲控制电路、数据采集及显示电路三部分单元线路组成,工作稳定,连接件界面连接良好,达到了设计目的,连接过程中平均电流和连接速率提高。In this study,a high-voltage pulse power applied in the anodic bonding between the ceramics and metals has been designed.On the basis of this power, the test of anodic bonding has been carried out.The system of this power is made up of high-voltage direct current working circuit,pulse control circuit,data gather and display circuit with steady work,well bonded of parts interface which has got the design goal.In the anodic bonding process,the average current and the rate of bonding are raised notably.

关 键 词：阳极连接 MEMS 脉冲电源 

分 类 号：TM286[一般工业技术—材料科学与工程]