创新设计的K-Alpha电子能谱仪  

Innovative designed K-Alpha electron spectrometer

作　　者：刘洁[1] 刘芬[2] 赵良仲[2] 

机构地区：[1]北京师范大学分析测试中心,北京100875 [2]中国科学院化学研究所,北京100080

出　　处：《现代仪器》2007年第1期53-56,共4页Modern Instruments

摘　　要：本文简单介绍新型高性能、一体化结构的K-Alpha型X射线光电子能谱(XPS)仪的主要特点,包括:全自动样品分析能力,先进的样品导航系统和摄像系统,独特的样品照明方式,用专利技术设计的样品荷电自动补偿装置,方便的谱仪自动校准功能,快速的XPS成像分析能力和高质量的深度剖析,紧凑的组装和小巧的体积,以及高性能价格比等等。这些特点相结合不仅简化XPS操作,而且提高XPS谱仪的分析能力和使用效率,满足用户对现代XPS分析的需求。The paper briefly introduces features of a new type of high performance, integrated X-ray photoelectron spectrometer--K-Alpha, including its fully automatic sample analysis capability, advanced sample navigation and camera system, unique sample illumination method, patented charge compensation technology of samples, easy and automatic calibration and alignment of instrument, high sensitivity in whole range of analysis area, fast XPS mapping and high quality depth profile, and integrated and compact size of instrument and high ratio of specification to price etc. Combining these benefits, XPS operation becomes so easy. XPS analysis ability and efficiency are dramatically improved. These meet users＇ requirement for modem XPS analysis.

关 键 词：X射线光电子能谱 表面分析 荷电补偿 深度剖析 样品导航 

分 类 号：TH838.2[机械工程—仪器科学与技术]