聚焦离子束研制半导体材料光子晶体  

Fabrication of photonic crystal on semiconductor materials by using focued ion-beam

作　　者：许兴胜[1] 熊志刚[2] 金爱子[2] 陈弘达[1] 张道中[2] 

机构地区：[1]中国科学院半导体研究所光电子集成国家重点实验室,北京100083 [2]中国科学院物理研究所,北京100080

出　　处：《物理学报》2007年第2期916-921,共6页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:60345008;60377011;60537010)资助的课题~~

摘　　要：介绍了利用聚焦离子束设备在多种半导体材料上成功研制的近红外波段二维光子晶体,给出了相关微加工结果,发现微加工的尺寸和理论设计尺寸相吻合;测试了所加工的无源光子晶体光子带隙和有源光子晶体的发光谱.实验证明聚焦离子束可以研制二维光子晶体及相关光子晶体器件.A method of manufacturing two-dimensional photonic crystals on several kinds of semiconductor materials in near infrared region by a focused ion beam is introduced, and the corresponding fabrication results are presented and show that the obtained parameters of fabricated photonic crystals are identical with the designed ones. Using the tunable laser source, the spectra of the fabricated passive photonic crystal and the active photonic crystal are measured. The experiment demonstrates that the focused ion-beam can be used to fabricate the perfect two-dimensional photonic crystals and their devices.

关 键 词：聚焦离子束 半导体材料 光子晶体 

分 类 号：O734[理学—晶体学]