Studies on Crystal Orientation of ZnO Film on Sapphire Using High-throughout X-ray Diffraction  

作　　者：HOU Chang-min HUANG Ke-ke GAO Zhong-min LI Xiang-shan FENG Shou-hua ZHANG Yuan-tao ZHU Hui-chao DU Guo-tong 

机构地区：[1]State Key Laboratory of Inorganic Synthesis and Preparative Chemistry, College of Chemistry [2]College of Electronic Science and Engineering, Jilin University, Changchun 130012, P. R. China Received Apr. 26, 2006

出　　处：《Chemical Research in Chinese Universities》2007年第1期1-4,共4页高等学校化学研究（英文版）

基　　金：Supported by the National Nature Science Foundation of China(Nos.20071013 and 20301007)

摘　　要：The orientation of the nano-columnar ZnO films grown on sapphire using the technique of metal-organic chemical vapor deposition （MOCVD） exhibits deviation because of the mismatch between the crystal lattices of the films and the sapphire substrate. A high-throughout X-ray diffraction method was employed to determine the crystal orientation of the ZnO films at a time scale of the order of minutes based on the general area detection diffraction system （GADDS）. This rapid, effective, and ready method, adapted for characterizing the orientation of the nano-columnar crystals is used to directly explain the results of observation of the X-ray diffraction images, by the measurements of the orientations of the crystal columns of the ZnO films along c-axis and in parallel to ab plane.The orientation of the nano-columnar ZnO films grown on sapphire using the technique of metal-organic chemical vapor deposition （MOCVD） exhibits deviation because of the mismatch between the crystal lattices of the films and the sapphire substrate. A high-throughout X-ray diffraction method was employed to determine the crystal orientation of the ZnO films at a time scale of the order of minutes based on the general area detection diffraction system （GADDS）. This rapid, effective, and ready method, adapted for characterizing the orientation of the nano-columnar crystals is used to directly explain the results of observation of the X-ray diffraction images, by the measurements of the orientations of the crystal columns of the ZnO films along c-axis and in parallel to ab plane.

关 键 词：ORIENTATION ZnO films MOCVD 

分 类 号：TN304.21[电子电信—物理电子学] O722[理学—晶体学]