一种基于压电薄膜逆压电效应的新型集成微镜  

A Novel Integrated Micro-mirror Based on Piezoelectric Thin Film Converse Piezoelectric Effects

作　　者：娄利飞[1] 杨银堂[1] 汪家友[1] 毕发社[2] 

机构地区：[1]西安电子科技大学微电子所宽禁带半导体材料与器件教育部重点试验室,陕西西安710071 [2]西安通信学院军事综合信息网教研室,陕西西安710106

出　　处：《压电与声光》2007年第1期29-32,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(90207022);武器装备预研基金资助项目(51411040105DZ0141)

摘　　要：设计了一种采用锆钛酸铅(PZT)压电薄膜悬臂梁作为驱动机理的500μm×500μm微镜结构。该微镜主要由4个悬臂梁与1个反射镜组成,4个悬臂梁起支撑微镜的作用,即微镜主要利用微悬臂梁自由端头的小挠度来实现垂直方向的位移。提出了与互补金属氧化物半导体(CMOS)工艺相兼容的制作方法,利用有限元软件ANSYS7.0对压电微镜的反射镜平整度、结构机械强度、线性度、响应速度和功耗等性能进行了研究,并与数值计算结果进行了比较,结果表明此微镜达到了快速、高精度、低功耗的设计要求。A 500μm× 500 μm micro-mirror structure actuated by PZT piezoelectric cantilever beam was designed. The micro-mirror consists of four cantilever beams and a speculum, and the four cantilever beams supported the speculum. The deflection of cantilever beam free end engendered uprightness displacement of micro-mirror. A new fabrication process of the micro-mirror compatible with COMS was presented. The smooth degree of reflection mirror, mechanical strength, linearity, response speed and power consume of micro-mirror were simulated by using finite element method software ANSYS7.0. The simulating results were compared with theory computing results, which shows that the micro-mirror achieves the design goals of celerity, high precision and low power consumption.

关 键 词：微镜 有限元模拟 压电薄膜 

分 类 号：TN256[电子电信—物理电子学]