压入测试仪柔度标定方法研究  

Study on the calibration methods of machine compliance for depth-sensing indentation instrument

作　　者：周向阳[1,2] 蒋庄德[1,2] 王海容[1,2] 

机构地区：[1]机械制造系统工程国家重点实验室 [2]西安交通大学精密工程研究所 西安 710049

出　　处：《仪器仪表学报》2007年第1期85-89,共5页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(50405030);国家自然科学基金(50535030);国家重点基础研究发展计划"973"(2004CB619302)资助项目

摘　　要：仪器柔度标定和位移校准是压入法测试的一项重要工作,通过对各种标定方法特点的综合比较认为Doerner-Nix法是一种理想的折中方法,结果相对可靠并易于操作。利用该法对微压入测试仪进行了标定,获得的柔度值为0．61×10-6m/N。仪器校准后得到的Si(100)弹性模量和硬度值与文献值符合较好,而未校准直接获得的2个测试值比校准后分别低21．5％和2．4％。Machine compliance calibration and displacement correction are crucial to the reliability of the evaluated results using indentation technique. In order to acquire a proper method available for daily calibration of depth-sensing indentation instruments, different methods were compared. The results indicate that the calibration method proposed by Doerner and Nix is an ideal compromised one, which has the advantages such as convenience, rapidness and reliability. The machine compliance of a micro-indentation instrument was calibrated using this method, and the result machine compliance is 0.61 × 10^-6 m/N. The test experiments on Si（100） sample show that the evaluated values of Young＇s modulus and hardness from calibrated instrument agree well with literature data, but the results from uncalibrated instrument are 21.5% and 2.4% lower respectively.

关 键 词：压入法 仪器柔度 标定 MEMS 力学性能 

分 类 号：TH879[机械工程—仪器科学与技术]