基于Labview技术的光度式椭偏测厚仪的研究与设计  

Research and Design of Photoelectric Analysis Type Ellipsometer Based on Labview Technology

作　　者：张牧[1] 张诚[1] 陈才和[2] 王金海[1] 张波[1] 岳泉[1] 

机构地区：[1]天津工业大学,天津300160 [2]天津大学精密仪器与光电子工程学院

出　　处：《电子器件》2007年第1期170-173,共4页Chinese Journal of Electron Devices

基　　金：国家自然科学基金资助项目(49874031)

摘　　要：本文介绍了一种基于Labview的光度式椭偏仪光学测量系统,用于进行透明薄膜厚度的精确测量.研究并推导出该系统的数学模型及椭偏参数的计算公式.基于C8051F020单片机设计出椭偏仪的控制器并使用Labview编写了测量软件.在测量软件中嵌入MatlabScript节点,完成复杂运算.通过对SiO2薄膜的测试,验证了仪器具有良好的可靠性和重复性,薄膜厚度误差小于100A。,折射率误差小于0.01.The paper introduces a photoelectric analysis type ellipsometer optical system based on Labview, which can realize accurate measurement of film thickness. The mathematical model of the system and the formula of elliptical parameter are researched and deduceck The ellipsometer controller using C8051F020 is designed and the Labview testing soft is developed. Through the testing of SiOz film, it has been proved that the reliability and repetition of the instrument are favorable. The measurement error of the film thickness is less than 100 A and the measurement error of the refractivity rate is less than 0. 01.

关 键 词：椭偏仪 光度法 虚拟仪器Labview C8051F020 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]