非热式微流量传感器  

Non-Thermal Micro Flowmeters

作　　者：魏泽文[1] 秦明[1] 黄庆安[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,南京210096

出　　处：《电子器件》2006年第4期1065-1070,共6页Chinese Journal of Electron Devices

基　　金：国家自然科学基金资助(60476019);新世纪人才计划资助项目

摘　　要：基于微机械加工技术的微流量传感器是微传感器中重要的一种,目前,对微流体测量的研究主要集中在对流体流量和流速的测量上,按照测量方式的不同,微流量传感器可分为加热式和非加热式两种。本文概述了可以用来实现非热式微流量传感器的物理原理,并以此分类,综述了已有的非热式微流量传感器,对它们的优缺点进行了分析。通过对这些传感器进行的比较可以发现,虽然它们采取的原理和实现方法以及性能各不相同,但是它们有同样的优点就是功耗小。目前,阻碍非热式微流量传感器应用的最大障碍就是难以实现二维或三维方向的测量以及难以和标准CMOS工艺兼容。Micro flowmeters based on the micro mechanic process is an important species of micro sensors. Current researchers focus on the measuring of the flux and velocity of flow. By the difference of the measure method, micro flowmeters can be divided into two classes： thermal flowmeters and non-thermal flowmeters. The physic principle can be used to actualize non-thermal flow sensors are presented. Classified by these physic principles, some reported non-thermal micro flowmeters are introduced. Then, advantages and disadvantages of them are analyzed. By comparison with these flowrneters, it is suggested that their universal advantage is low power consumption even though they have different physic principles, fabricating process and performance. At present, the biggest obstacle to utilize non-thermal flowmeters is how to measure planar or three-dimensional directions and make it be compatible with the standard CMOS process.

关 键 词：非热式 流量传感器 伯努利方程 微机械 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]