MEMS磁场传感器的研究进展  

The Status of the Magnetic Field Sensors

作　　者：陈洁[1] 黄庆安[1] 秦明[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,南京210096

出　　处：《电子器件》2006年第4期1384-1388,共5页Chinese Journal of Electron Devices

基　　金：国家自然科学基金重点项目资助(90607002)

摘　　要：磁场检测在工农业生产和人们日常生活中非常普遍。随着微电子机械(MEMS)的发展,用MEMS技术研制磁场传感器正获得越来越多的研究。基于MEMS磁场传感器的原理,对各类磁场传感器做了简要介绍,评述了各种MEMS磁场传感器的加工工艺及工作原理,并对MEMS磁场传感器的发展进行了展望。Magnet detection is popular in industry and agriculture process and people＇s daily life. Along with the research and rapid development of micro Electro-Mechanical systems （MEMS） in recent years, more and more researches on the magnetic field sensors are appeared. This paper briefly reviews some kinds of magnetic field sensors and evaluates the fabrication technology and the sensitivity based on the principle of these MEMS sensors. The trends of the micromachined magnetic field sensors in future are discussed.

关 键 词：磁场传感器 MEMS 洛仑兹力 谐振 

分 类 号：TN43[电子电信—微电子学与固体电子学]