微机械继电器的研究及进展  

Research and Development of Micromachining Relay

作　　者：刘本东[1] 李德胜[1] 

机构地区：[1]北京工业大学机电学院,北京100022

出　　处：《微纳电子技术》2007年第2期88-92,110,共6页Micronanoelectronic Technology

基　　金：国家863项目资助(2003AA404140)

摘　　要：对静电驱动微继电器、热驱动微继电器和电磁驱动微继电器的驱动原理和特点分别进行了分析, 介绍了国内外具有代表性的几种微继电器的结构、制作工艺、关键部件的尺寸, 并探索了静电驱动、热驱动和电磁驱动微继电器的发展前景。The principle and characteristics of electrostatic microrelay, electromagnetic microrelay and electrothermal microrelay were analyzed. The structure, fabrication process and dimensions of the key part of several representative microrelays were introduced, and the potential perspective of electrostatic microrelay, electromagnetic microrelay and electrothermal microrelay were discussed.

关 键 词：微继电器 微驱动器 微机电系统 

分 类 号：TN43[电子电信—微电子学与固体电子学]