基于扇形MAGFET同步取样模式的CMOS磁敏传感器集成电路  

A CMOS Magnetic Sensor Integrated Circuits Based on the Synchronized Sampling Function of Sector MAGFET

作　　者：郭清[1] 朱大中[1] 

机构地区：[1]浙江大学信息学院微电子技术与系统设计研究所,杭州310027

出　　处：《传感技术学报》2006年第6期2391-2394,2398,共5页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金(NSFC)资助(90307009)

摘　　要：研究了基于扇形MAGFET同步取样模式的CMOS磁敏传感器集成电路,并由0.6μmCMOS工艺实现。该CMOS磁敏传感器集成电路以共源极的扇形分裂漏磁敏MOS管作为磁敏传感单元,使磁敏传感器在参考工作模式和测量工作模式下实现同步取样,测量垂直磁场的同时,实现了在屏蔽磁场的参考工作模式下对磁敏传感信号进行噪声校正的功能.经过集成电路芯片的测试验证,同步取样模式具有较好的噪声校正功能,工作频率为20kHz时,磁敏传感器的灵敏度为2.62V/T.Based on the synchronized sampling function of sector split-drain magnetic field-effect transistor （MAGFET）, the CMOS magnetic sensor integrated circuit is designed and developed in a 0. 6μm standard CMOS technology. The sector MAGFET works as the magnetic sensor cell, which works at the synchronized sampling functioning modes： the measurement functioning mode and the reference functioning mode. The magnetic sensor integrated circuits realize the measurement of magnetic field as well as the noise-shaping by the synchronized sampling functioning modes. The measurements of the sensor IC indicate that the noise-shaping works well by the synchronized sampling function. The sensitivity of the magnetic sensor integrated circuit is 2. 62 V/T at the working frequency of 20 kHz.

关 键 词：扇形分裂漏磁敏晶体管 同步取样 互补金属氧化物半导体 磁敏传感器 

分 类 号：TN432[电子电信—微电子学与固体电子学] TP212.13[自动化与计算机技术—检测技术与自动化装置]