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机构地区:[1]陕西师范大学化学与材料科学学院,陕西西安710062
出 处:《现代生物医学进展》2007年第2期211-214,共4页Progress in Modern Biomedicine
基 金:北京市重点实验室开放课题
摘 要:本文以单晶硅为基体,Ar等离子体对基体进行清洗,用法制备类金刚石(DLC)膜和掺氮的DLC膜。沉积DLC膜所用的气体是乙炔和氩气,沉积掺氮的DLC膜用乙炔和氮气。利用衰减全反射红外光谱(ATR-FTIR)和扫描电子显徽镜(SEM)对沉积的DLC膜和掺氮的DLC膜进行结构分析和观察表面形貌。考察了乙炔比例、放电功率等沉积参数对DLC膜的影响。通过接触角和血小板黏附实验,进行了DLC膜的抗凝血性能分析,效果较好。In this paper, the property of Diamond-like Carbon (DLC)films and the advances in the research were reviewed. The DLC films were prepared with Ar and C2H2, and the DLC films with nitrogen were prepared with C2H2 and N2 by PECVD on the surface of silicon which was rinsed by Ar plasma. The structure and surface topography of the DLC films was investigated by ATR-FYIR and SEM. Effect of power and proportion of gases for the DLC films were studied. The anticoagulafive property of DLC films was studied by the contact angle and the platelet adhesion experiment. The result showed that the DLC films and the DLC films with nitrogen can be effectively prepared with C2H2 by PEGVD.
关 键 词:类金刚石膜 等离子体 化学气相沉积法 血小板黏附
分 类 号:TG174.444[金属学及工艺—金属表面处理]
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