SR-FEL宽带腔镜与双带腔镜光学膜系实验研究与研制  

Development of the Broadband and Dual-band Cavity Mirrors for SR-FEL at 355nm and 248nm

作　　者：高怀林[1] 王乃彦[2] 王东蕾[1] 王永[1] 

机构地区：[1]中国科学院电子学研究所,北京100080 [2]中国原子能科学研究院,北京102413

出　　处：《高能物理与核物理》2007年第4期405-408,共4页High Energy Physics and Nuclear Physics

基　　金：国家自然科学基金(10475081)资助~~

摘　　要：利用“电子束蒸发沉积薄膜生长技术+离子束溅射沉积薄膜生长技术”、“HfO2／SiO2+Al2O3／SiO2+M-SiO2”复合光学膜系设计技术、400℃×4h高温处理技术,研制的SR-FEL宽带腔镜光学膜系在355nm中心波长的绝对光学反射率测量值为R(355nm)=99．45％,反射光谱带宽测量值为Δλ(R≥99．00％)=75nm;研制的355nm／248nm双带腔镜光学膜系,在355nm中心波长,其绝对光学反射率测量值为R(355nm)=99．69％,反射光谱带宽测量值为Δλ(R≥99．00％)=59nm;在248nm中心波长, R(248nm)=98．21％,绝对光学反射率光谱带宽测量值Δλ(R≥99．00)=9mm,Δλ(R≥98．00％)=33nm．The cavity mirrors of the storage-ring free-electron laser （SR-FEL） at 355nm and 248nm central wavelengths have been developed with the technologies of electron-beam evaporation deposition and ion-beam sputter deposition. The mirror coatings consists of ＂HfO2/SiO2＋Al203/SiO2＋M-SiO2＂.The absolute reflectance and frequency-tunable range at 355nm are R=99.45% and △λ （R≥99.00%）=75nm, respectively, for the broadband resonator mirror. For the mirror with the dual-central wavelengths, R=99.69% and △λ （R ≥99.00%）=59nm for the first band at 355nm; For the second band at 248nm, R=98.21%, △λ （R ≥99.00%）=9nm and △λ （R≥98.00%）=51nm.

关 键 词：储存环自由电子激光 腔镜光学膜系 电子束蒸发沉积 离子束溅射沉积 

分 类 号：O484.1[理学—固体物理]