基于昆虫毛状感触器的微型流速传感器有限元模拟分析(英文)  

Finite Element Analysis of Low-Velocity Gas Flow Microsensor Based on Trichoid Sensillum of Insects

作　　者：陈健[1] 陈德勇[1] 王军波[1] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室,北京100080

出　　处：《传感技术学报》2007年第4期735-737,共3页Chinese Journal of Sensors and Actuators

摘　　要：给出一种基于昆虫毛状感触器的微型仿生传感器,用以测量低速气体流动.分析昆虫毛状感触器和这种微型仿生传感器的工作机理.采用ANSYS的多场耦合模型进行模拟以充分考虑到固体场与流体场的相互作用,提出有限元分析中流体模型的边界条件和尺寸选择的标准.有限元模拟证实,低速气体的流速与应变片测量的薄膜根部应力在微尺度范围内有良好线性关系.而且简单分析和初步探讨基于悬臂梁的薄膜的尺寸对于根部应变的影响.A new biomimetic microsensor modeled on trichoid sensillum of insects which can detect low velocity gas flow is demonstrated. The principle of trichoid sensillum and designed biomimetic microsensor has been proposed. FEA（Finite Element Analysis） simulation is conducted in which interaction between fluid domain and structural domain is taken into consideration to evaluate this design.. Boundary conditions and dimension choice of fluid model has been put forward. Result of FEA simulation asserts that there exists excellent linear relationship between relatively low velocity and strain in the micro domain. What is more, the effect of different sizes of cantilever-based thin film on the output of microsensor has been explored too.

关 键 词：微机械电子系统 仿生传感器 有限元模拟 微尺度低速气体流动 应变片 

分 类 号：TP212.3[自动化与计算机技术—检测技术与自动化装置]