基于原子力显微镜的微纳结构力学测试系统  

MECHANICAL MEASUREMENT SYSTEM FOR MICRO-NANO STRUCTURE BASED ON ATOMIC FORCE MICROSCOPY

作　　者：鲍海飞[1] 李昕欣[1] 张波 郭久福 韩建强[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所,上海200050 [2]上海爱建纳米科技发展有限公司,上海200237

出　　处：《机械强度》2007年第2期223-227,共5页Journal of Mechanical Strength

基　　金：国家863项目资助(2004AA4045);国家自然科学基金资助项目(60376038)~~

摘　　要：原子力显微镜是微纳米尺度科学研究中的一个精密仪器,从原理和应用,设备的软件、硬件的扩展都具有很大的发展空间。随微纳机电系统的应用,非常迫切需要开发基于原子力显微镜的力学相关测试系统。在此情况下,着重开发部分相关力学测试软件和系统硬件的扩展。基于原子力显微镜中的一个最基本的力—位移曲线功能,开发力学测试软件,实施单点、多点的力曲线测量,疲劳度测量和单线扫描四个测试功能,系统在硬件上增添微动平台,具有较大的横向位移,保证微纳结构尺寸的测试。相关测试表明,该软件具有较好的一致性和使用性,能方便地进行力学量的提取。Atomic force microscopy（AFM） is a very precise apparaturs in the micro-nano scientific research. From the point of view of theory and applications, there is a very big room for the development in the hardware and software extension of AFM. With the development of microsystem, it is very imperious to develop the mechanical measurement system based on the AFM. Under such a situation, this research emphasizes the research and development of the mechanical measurement system mainly composed of the software edition and hardware extension. Based on the built in function of force-displacement relationship in a AFM, a mechanical measurement system, on which four functions such as the single point measurement, multi-points measurement, fatigure measurement and single line scan functions are developed. A micro XY movable stage is designed and implemented for the measurement requirement of microdevices with large dimensions. The measurement shows there is a good consistence in functions and convinience in use, by which mechanical parameters can be substracted easily.

关 键 词：原子力显微镜 微纳结构 硬件软件 悬臂梁 力学测试 

分 类 号：TH742[机械工程—光学工程]