尺蠖型压电直线驱动器的运动稳定性分析  

Analysis of Motion Stability for Inchworm-Type Piezoelectric Linear Actuator

作　　者：赵宏伟[1] 吴博达[1] 杨志刚[1] 程光明[1] 

机构地区：[1]吉林大学机械工程学院,长春130025

出　　处：《纳米技术与精密工程》2007年第1期49-54,共6页Nanotechnology and Precision Engineering

基　　金：国家"863"计划资助项目(2002AA423150);国家自然科学基金资助项目(50475010);高等学校博士学科点专项科研基金资助项目(20050183020).

摘　　要：为了深入研究尺蠖型压电驱动器的性能,分析了尺蠖型压电直线驱动器的工作原理,研究了直线动子对驱动器性能的影响.通过实验方法分析了钳位机构调整前后对钳位稳定性的影响.采用驱动器输出单步位移的步距失稳系数和驱动电压与输出位移拟合曲线斜率和截距偏差率的方法评价尺蠖型压电直线驱动器的运动稳定性.经实验测试发现驱动器的步距失稳系数与驱动电压关系密切,当驱动电压较高时,驱动器具有较好的步距稳定性.驱动器的驱动电压与输出位移拟合曲线斜率和截距偏差率分别为1.80/0和9.070/0,说明所开发的驱动器具有很好的运动稳定性.To study the performance of inchworm-type piezoelectric actuator deeply, the structure and working principle of inchworm-type piezoelectric linear actuator are analyzed to study the influence of linear mover to the whole actuator. The clamping stability of the clamping structure is analyzed via experiment. The motion stability of the inchworm-type piezoelectric linear actuator is evaluated by the proposed method which is based on warping ratio of slope and intercept of experiential equation between actuating voltage and corresponding stepping motion displacement. The results show that lost stability ratio is close associated with actuating voltage, and the higher the actuating voltage is, the better stability of stepping displacement the actuator has. The warping ratio of slope and intercept of experiential equation between actuating voltage and corresponding stepping motion displacement is 1. 8% and 9.07% respectively, and it is shown that the actuator has good motion stability.

关 键 词：压电驱动器 尺蠖运动 直线运动 微纳米定位 稳定性分析 驱动电压 

分 类 号：TH703[机械工程—仪器科学与技术]