精密定位中的激光干涉测量误差分析  

Error Analyses for Measuring of Laser Interferometer in Precision Positioning

作　　者：程维明[1] 葛轶君[2] 

机构地区：[1]上海工程技术大学机械工程学院,上海201620 [2]上海大学机电工程与自动化学院,上海200072

出　　处：《上海工程技术大学学报》2006年第4期287-290,共4页Journal of Shanghai University of Engineering Science

基　　金：国家863高新技术研究发展计划资助项目(2002AA404450)

摘　　要：高精度定位平台通常以激光干涉仪为测量基准。根据测量原理,激光干涉仪的测量误差应为定位平台误差的1/3-1/2,这样才能保证测量结果的可信性。为此,对影响激光干涉仪测量精度的诸多因素作了分析,并在分析的基础上进行误差计算。计算结果表明,激光干涉测量系统的综合误差为12.3 nm,满足定位平台的精度要求,二者在精度上能很好匹配。The measurement of a positioning stage with high precision is usually based on a laser interferometer. According to the principle of measurement, the measuring error of the interferometer should be about 1/ 3 to 1/2 of that in the positioning stage, so that the measuring results are believable only in this condition. Analyses show that there are different factors which influence the precision of the interferometer. The error calculation based on the analyses gives results that show the synthetic error of the laser interferometer measuring system is 12.3 nm, which is sufficient to meet requirements of the positioning stage because both of them are completely matched in precision.

关 键 词：精密定位 误差分析 激光干涉仪 

分 类 号：TH744[机械工程—光学工程]