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机构地区:[1]清华大学机械工程系清华大学先进成型制造重点实验室,北京100084 [2]中国科学院上海微系统与信息技术研究所,上海200050
出 处:《物理化学学报》2007年第4期565-568,共4页Acta Physico-Chimica Sinica
基 金:国家自然科学基金(10332020)资助项目
摘 要:采用粘性胶状物作为生长单壁碳纳米管(SWNTs)的催化剂前驱体,在原子力显微镜下驱动废旧的硅探针粘附该种胶状物,随后进行化学气相沉积(CVD),实现了SWNTs在硅探针末端的定位生长,成功地制备出了SWNT针尖.对SWNTs及SWNT针尖进行了表征,并对针尖的稳定成像条件进行了分析.结果表明,针尖一般由5-10nm的SWNT管束构成,伸出长度仅为几百纳米,受热振动影响较小,无需后处理即可稳定地成像,成像分辨率与新的硅探针相当.An adhesive semisolid mixture was used as catalyst precursors for the synthesis of single-walled carbon nanotubes (SWNTs). With atomic force microscopy (AFM), worn-out silicon probes were driven to approach the glue-like catalyst precursors, followed by chemical vapor deposition (CVD). Thus SWNTs were successfully located on the end of silicon probes as AFM tips. The as-prepared SWNTs and tips were characterized, and the effect of SWNT morphology on imaging stabilization was discussed. The results showed that most of tips were SWNT bundles, which were 5-10 nm in diameter, several hundred nanometers in length and independent of severe thermal vibration. When SWNTs were parallel to the axis of silicon pyramids, the tips could obtain high-resolution images without additional treatments.
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