一种单稳态微电磁继电器的研究  

Research of a monostabillity micro electromagnetic relay

作　　者：刘本东[1] 李德胜[1] 杨晓波[2] 

机构地区：[1]北京工业大学机械工程与应用电子技术学院,北京100022 [2]北京农业职业技术学院,北京102208

出　　处：《光学精密工程》2007年第4期543-549,共7页Optics and Precision Engineering

基　　金：国家863计划资助项目(No.2003AA404140)

摘　　要：优化设计出一种微电磁继电器,介绍了其驱动原理,通过对微电磁继电器的电磁驱动力及活动衔铁的位移进行分析计算,设计了微电磁继电器的三维结构,以增大磁路效率,减小漏磁通,从而增加电磁驱动力。采用MEMS加工工艺,试制了该新型微电磁继电器的样件,其尺寸为5 mm×5 mm×1 mm,它由上磁路、下磁路、平面励磁线圈、固定触点和活动衔铁等部分组成。微电磁继电器的平面励磁线圈电阻约20Ω,外加5 V电压时,微电磁继电器可实现吸合动作。吸合后,微电磁继电器的导通电阻为14.5Ω,继电器的响应时间为1 ms。A new optimized structure of micro electromagnetic relay was introduced, and its working principle was presented. By analysis of the driving force and the displacement of the armature, a three-dimensional structure was designed to increase the efficiency of magnetic circuit. A prototype micro electromagnetic relay with dimension of 5 mm × 5 mm × 1 mm was fabricated based on the MEMS fabrication process. The micro relay consist of a magnetic circuit, an excitation planar coil, a fixed contact pad and a permalloy cantilever （armature）. Experimental result shows that when the micro electromagnetic relay in the resistance of the excitation coil of 20 Ω works at 5 V,its contact resistance is 14.5 Ω and respond time is about 1 ms under the electromagnetic actuation.

关 键 词：微电磁继电器 微驱动器 MEMS 

分 类 号：TM581.3[电气工程—电器]