基于MEMS技术的微操作三维力传感器研究  

Research on a tri-axial force sensor based on MEMS technology for micromanipulation

作　　者：荣伟彬[1] 王家畴[1] 赵玉龙[2] 陈立国[1] 孙立宁[1] 

机构地区：[1]哈尔滨工业大学机器人研究所,哈尔滨150001 [2]西安交通大学精密工程研究所,西安710049

出　　处：《仪器仪表学报》2007年第4期692-698,共7页Chinese Journal of Scientific Instrument

基　　金：国家863计划(2006AA04Z256);长江学者和创新团队发展计划资助项目

摘　　要：针对微操作过程中对微力觉信号的需求,以压阻检测技术为基础结合MEMS加工工艺,设计了一种用于微操作的三维力传感器,建立传感器的数学模型并用有限元分析软件对敏感弹性元件进行分析。利用悬臂梁受力弯曲变形的原理结合显微视觉技术,实现对传感器的标定,并给出了传感器的信号处理方法。实验证明,该传感器具有耦合小、测量分辨率高、线性度好、标定简单的优点,满足了预计的设计要求。传感器最大量程为10mN,X向与Y向的分辨率均为2.4μN,Z向的分辨率为4.2μN。A novel tri-axial force sensor used in micromanipulation is presented, which is based on piezoresistive detection and fabricated on a single-crystalline-silicon using MEMS technology, After modeling the sensor, finite element method （FEM） is used to analyze the deformation of cross-structure elastic cantilever. Then the calibration method for the tri-axial sensor is proposed, which is based on the technology of microscopic vision and the principle of cantilever bending deflection ; and the signal processing circuit for the sensor output is presented. Experiment verifies that the sensor has the advantages such as： high intrinsic decoupling capability for strain gauge signals, high resolutions in all three axes, good linearity and repeatability and simple calibration. The sensor has the maximum measurement range of up to 10 mN with resolution of 2.4μN in X-axis and Y-axis, and resolution of 4.2μN in Z-axis.

关 键 词：三维微力传感器 压阻检测技术 有限元分析 标定实验 

分 类 号：TP216[自动化与计算机技术—检测技术与自动化装置]