离子束增强沉积Ni、Ti纳米金属薄膜的表面形貌与摩擦特性研究  

Study on Topography and Friction Properties of Nanometer Metallic Coatings

作　　者：夏冬生[1] 张会臣[1] 孙昌国[1] 高玉周[1] 严立[1] 

机构地区：[1]大连海事大学机电与材料工程学院,辽宁大连116026

出　　处：《润滑与密封》2007年第4期97-101,共5页Lubrication Engineering

基　　金：国家自然科学基金资助项目(50275015)

摘　　要：在原子力显微镜上对采用离子束增强沉积方法制备的N i、Ti纳米金属薄膜的形貌进行了观察,应用分形理论分析了薄膜表面的分形特征,并且对金属薄膜的纳米摩擦特性进行了研究,分析了载荷和表面力对金属薄膜摩擦特性的影响。结果表明,Ti薄膜晶粒细小,表面平整,而N i薄膜表面粗糙。N i、Ti沉积薄膜表面具有显著分形特征,各向同性。N i、Ti纳米薄膜的摩擦力均随载荷的增大而增大,并且都存在一个临界载荷值,超过这个值,摩擦力急剧增加。将分形理论和接触力学JKR模型结合,对纳米金属薄膜摩擦的临界载荷进行的预测与实验结果具有相同的趋势。Ni and Ti nanometer metal coatings on silicon substrates were synthesized by ion beam enhanced deposition method （IBED）. The morphology of the coatings was observed by atomic force microscopy and fractal characteristics of Ti and Ni coatings were analyzed with fractal theory. Nano-friction properties of metal coatings were tested and the effect of load and interfacial forces on friction was investigated. The results indicate that Ti film are smooth with the smaller grains, however Ni coating has a rough surface. Topography of Ti and Ni coatings surface has distinct fractal characteristics and isotropic property. The friction forces of nanometer metal coatings increase with load increasing. There exists a threshold, which friction forces increase sharply when load exceeds it. Critical normal load was analyzed and calculated based on JKR model and fractal theory,the results give similar tendency with experimental results.

关 键 词：纳米薄膜 离子束增强沉积 表面形貌 分形表征 临界载荷 摩擦 

分 类 号：TG115[金属学及工艺—物理冶金]