高温环境扫描电镜(KYKY1500)Ⅱ.调试与应用  

A New Environmental SEM with a Hot Stage(KYKY1500) Ⅱ Adjustment and Application

作　　者：邵曼君[1,2] 赵万敏[1,2] 肖骅昭 段岳[1,2] 余健业[1,2] 黄兰友[1,2] 

机构地区：[1]中国科学院化工冶金研究所 [2]中国科学院科仪中心

出　　处：《电子显微学报》1997年第1期65-70,共6页Journal of Chinese Electron Microscopy Society

摘　　要：本文扼要地叙述了ＫＹＫＹ１５００高温环境扫描电镜在常温通气状态下及高温通气状态下，为获得分辨率优于６０ｎｍ的图像所必须的参数选择，及在调试过程中所作的改进。同时。The selection of parameters for obtaining the resolution of the image better than 60nm with an Environmental Scanning Electron Microscope (ESEM) in an environmental of high temparature and gas flow is described in this paper. Moreover, some photographs of the morphology of fire resistant materials at high temperature and in gas flow environment and that of the natural micromorphology of some other moisture bearing at room temperature and in gas flow environment are provided.

关 键 词：环境扫描电镜 高温样品台 电镜 

分 类 号：TN16[电子电信—物理电子学]