加速度传感器在气体微流量检测中的应用  

Application of Acceleration Sensor in Gas Micro-flow Detection

作　　者：林引[1] 谢昭莉[1] 陈皎[1] 

机构地区：[1]重庆大学 自动化学院,重庆400044

出　　处：《计算机测量与控制》2007年第4期558-560,共3页Computer Measurement &Control

摘　　要：根据MEMSic(微电子机械系统集成芯片)加速度传感器的工作原理及特点,提出把加速度传感器作为流量传感器应用于气体微流量检测中,为了验证,建立了一套实验装置用于MEMSic加速度传感器检测气体的流动变化,利用PIC单片机对数据进行采集和处理,经过具体实验验证,在不同温度下,经过一定的温度补偿,当气体流量从0到50sccm发生变化,加速度传感器是能够精确的测量出流量的变化,说明了MEMSic加速度传感器对微流量的检测具有较高的灵敏度和稳定性。According to the principle and characteristics of the MEMSic acceleration sensor, take it as flow sensor which is applied to detect the gas slim flow. In order to confirm, a test installation is established using MEMSic acceleration sensor to detect the changes of the gas flow. The PIC is used to gather and process the data. It has been determined through experimentation that it is valid. It can accurately measure changes in gas flow rates from 0 to 50 standard cubic centimeters per minute for gas after compensation for errors at various temperatures, it intrednces be demonstrated that it has high sensitivity within the range at low flow velocities as well as high stability.

关 键 词：微电子机械系统 微流量 补偿 灵敏度 稳定性 

分 类 号：TP216[自动化与计算机技术—检测技术与自动化装置]