极紫外/软X射线多层膜衍射光栅  

EUV/SXR multilayer diffractive grating

作　　者：金春水[1] 张立超[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033

出　　处：《光电工程》2007年第5期27-32,102,共7页Opto-Electronic Engineering

基　　金：中国科学院长春光机所青年创新基金资助项目(60678034);应用光学国家重点实验室开放基金资助项目

摘　　要：多层膜光栅是集多层膜的高反射率与光栅的高光谱分辨于一身的新型光学元件,它的出现使得在极紫外/软X射线(EUV/SXR)波段采用非掠入射、高光谱分辨率的分光元件成为可能。对多层膜光栅的衍射特性进行了分析,这些衍射特性使多层膜光栅能够作为核心部件,实现很多新颖的EUV/SXR光谱仪器,如窄带X-UV单色仪与多色仪。近年来,多层膜光栅的制备领域不断地出现新的思想与方法,同时多层膜光栅的实际应用也不断增多。多层膜光栅作为一种重要的光学元件,在天文学、物理学和材料科学等领域具有广泛的用途。介绍了多层膜光栅在众多研究领域中的应用。Multilayer grating is a potent optical element in Extreme Ultraviolet （EUV） and Soft X-ray （SXR） region. By combining high reflectivity of multilayer and high spectral resolving ability of grating structure, multilayer grating enable the use of non-grazing incidence and high resolving power applications in EUV/SXR region. Dispersive characteristics of multilayer gratings are analyzed. By virtue of these characteristics, multilayer grating is a powerful optical element which is used in a wide region of astronomy, physics, material science, etc. In recent years, fabricating technologies of multilayer grating has been promoted greatly. Performance of multilayer grating is improved, Owing to this, application field ofmultilayer grating is largely extended,

关 键 词：极紫外 多层膜 衍射光栅 

分 类 号：TB43[一般工业技术]