故障树分析法在半导体设备故障诊断中的应用  

Application of Fault Tree Analysis in the Troubleshooting of Equipment of Semiconductor Industry

作　　者：姚刚[1] 

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051

出　　处：《半导体技术》2007年第3期205-207,共3页Semiconductor Technology

摘　　要：介绍了故障树分析法的原理。以反应离子刻蚀(RIE)设备的典型故障为例,建立故障树,通过求解最小实际故障来进行定性分析。尝试扩展故障树在故障判断和改进真空系统可靠性方面的应用,得出几个有针对性的结论。该方法能提高故障诊断的效率和准确性。The principle of FTA （fault tree analysis） was introduced. The typical RIE fault was illustrated to build up the fault tree and qualitatively analyze RIE fault by resolving the minimum practical fault. It was tried to apply FTA to the troubleshooting, reliability and other aspects of vacuum system. The method can raise the efficiency and precise rate of troubleshooting.

关 键 词：反应离子刻蚀 故障树 最小 割集 

分 类 号：TN304.054[电子电信—物理电子学]