利用磁控溅射与液氮冷凝相结合产生金属及其化合物团簇  

Engendering metal and its composite clusters by combining magnetic control sputtering and liquid nitrogen condensing

作　　者：韦伦存[1] 赵子强[1] 韩建伟[1] 钟运成 于金祥[1] 王浩[1] 

机构地区：[1]北京大学重离子物理研究所

出　　处：《核技术》1997年第2期83-86,共4页Nuclear Techniques

基　　金：国家教委优秀教师基金;自然科学基金

摘　　要：利用磁控溅射与液氮冷凝相结合的团簇产生设备成功地制备了多种金属及金属化合物（如Ｃｕ，Ｍｏ，Ｔａ，ＡｌＮ，ＴｉＮ，ＴａＮ）等团簇。团簇尺寸大小为２－３０ｎｍ，其微结构为晶体结构。By using liquid nitrogen cooling of sputtered atoms in flowing gas, a cluster machine has been set up. With this machine, many kinds of metal and metal nitride clusters, such as Cu, Mo, Ta, AlN, TiN and TaN, have been successfully generated. The size of the clusters is between 2nm and 30nm. The cluster's microstructure belongs to crystal structure.

关 键 词：团簇 晶体结构 金属化合物 磁控溅射 液氮 冷凝 

分 类 号：TG111[金属学及工艺—物理冶金]