飞秒激光微加工:激光精密加工领域的新前沿  

Femtosecond Laser Micromachining: Frontier in Laser Precision Micromachining

作　　者：何飞[1] 程亚[1] 

机构地区：[1]中国科学院上海光学精密机械研究所强场激光物理国家重点实验室,上海201800

出　　处：《中国激光》2007年第5期595-622,共28页Chinese Journal of Lasers

摘　　要：飞秒激光微加工技术具有加工精度高、热效应小、损伤阈值低以及能够实现真正的三维微结构加工等优点,这些特性是传统的激光加工技术所无法取代的。首先回顾了激光微加工和超短脉冲激光技术的发展历史,然后介绍超短脉冲激光与金属和介质材料相互作用的机制,接着阐述了飞秒激光直写、干涉和投影制备等各种加工方法的原理,重点讨论飞秒激光在三维光子器件集成、微流体芯片制备及其在生化传感方面的应用等,最后展望了飞秒激光微加工领域所面临的机遇和挑战,指出了未来的研究方向。Femtoseond laser micromachining enables fabrication of true three-dimensional （3D） microstructures with high precision and low heat effect and damage threshold, showing unique advantages over the traditional laser micromachining technology. We first review the histories of laser microprocessing and ultra-short pulse laser technology, and then outline the mechanisms of the interactions of ultra-short laser pulse with metals and transparent media. Next, we introduce several major technical approaches in the field of femtosecond laser micromachining such as femtosecond laser direct writing, multi-beam interference and projection patterning, as well as their applications in fabrication of 3D integrated optical devices, microfluidic chips, and chemical and biological sensors, etc. Lastly, we highlight the opportunities and challenges in the field, and suggest some directions for the future research.

关 键 词：超快光学 飞秒激光 光与物质相互作用 微加工 集成光学 双光子聚合 微流体 纳米颗粒 

分 类 号：TN249[电子电信—物理电子学]