薄型压电超声马达定子中旋转波形成机理初探  

Primary Research on Forming Mechanism of Rotating Wave in Stators of Thin-type Ultrasonic Motors

作　　者：张健[1] 沈德新[1] 王渭源[1] 

机构地区：[1]中国科学院上海冶金所传感技术国家重点实验室,上海200050

出　　处：《压电与声光》1997年第2期90-94,共5页Piezoelectrics & Acoustooptics

基　　金：国家攀登计划B"微电子机械系统"资助项目

摘　　要：详细分析了马达定子中旋转波(行波)的形成机理及其主要特征(包括动能、势能和角动量等),论述了定子-转子交界面粒子椭圆振动的形成,表明压电马达定子中的波不同于传统的驻波和行波,而是被人称之为第三种波——旋转波。同时,也预示了压电定子中旋转波产生同电极设置和外界激励方式的关系。讨论了定子的固定方式。根据这一理论,研制出了由位相差为90°的双功率源驱动的压电旋转波马达,外加电压10 V时,马达的最高转速可达100 r/min。The forming mechanism and major properties (such as dynamic energy, potential energy, angular momentum etc. )of rotating wave in the stator of ultrasonic motor were analyzed in detail. The ellipitical motion formed in the interface between stator and rotor was also explained. All these showed that the wave in piezoelectric stator is not the traditional progressive wave or standing wave, and seemed to be the so-called third kind of wave-rotating wave. The research also indicated that there exists a relationship between the rotating wave and the electrode arrangement, external excitation power source and etc. The fixed mode of the motor was also discussed. According to this theory, the piezoelectric rotating wave motor with two phase electric supply whose phases are shifted 90° relative each other and two pairs of electrodes in the plane of the stator had been fabricated.

关 键 词：压电效应 二重简并模式 旋转波 压电超声马达 

分 类 号：TM350.1[电气工程—电机]