部分熔融Ce-Fe合金低温快速抛光CVD金刚石膜  

Diamond Films by CVD and High Rate Polishing at Low Temperature with Partially Molten Ce-Fe Alloy

作　　者：李俊杰[1] 王树彬[1] 孙玉静[1] 田莳[1] 张跃[1] 

机构地区：[1]北京航空航天大学,北京100083

出　　处：《稀有金属材料与工程》2007年第5期933-936,共4页Rare Metal Materials and Engineering

摘　　要：采用溶碳活性很高的稀土金属Ce和过渡金属Fe熔炼出Ce-7%Fe(原子分数,下同)合金,利用该合金对CVD金刚石膜进行热化学抛光。结果表明:Ce-7%Fe合金在592℃就可以抛光金刚石膜,比报道的稀土抛光温度要低200℃以上;在680℃抛光3h表面粗糙度Ra值由原来的5.95μm降低到0.69μm,抛光效率高达30μm/h;SEM观察表明,抛光使膜的表面光洁度有明显提高;经拉曼光谱检测,抛光没有对金刚石膜造成任何污染。A new effective technique for polishing free-standing diamond films at low temperature is proposed. The alloys （Ce-7%Fe） were smelted with rare earth metal Ce and transition metal Fe of high carbon solubility. Using the alloy, the CVD diamond films were thermal-chemically polished. The experimental results indicate that the diamond films could be polished by Ce-7%Fe at 592℃, even 200 ℃ lower than the temperature used in reported rare earth polishing process. The value of Ra is decreased from 5.95μm to 0.69 μm after polished at 680℃ for 3 hours with a high removal rate of 30 μm/h. SEM results show that the polished diamond films become much smoother. Furthermore, the Raman spectra analyses show that the surface of diamond films have not been contaminated after polishing.

关 键 词：Ce—Fe合金 低温 高效 抛光 CVD金刚石膜 

分 类 号：TG175[金属学及工艺—金属表面处理]