基于单模光纤的微操作机器人系统标定方法  

Calibration method for micro-manipulator systems based on single mode fibers

作　　者：黄大刚[1,2] 王宝光[1] 赵新[2] 

机构地区：[1]天津大学精密测量技术与仪器国家重点实验室,天津300072 [2]南开大学机器人与信息自动化研究所,天津300371

出　　处：《高技术通讯》2007年第4期389-394,共6页Chinese High Technology Letters

基　　金：863计划（2002AA422200）,国家自然科学基金（60475038,59875066）资助项目.

摘　　要：提出了用牛顿环中心位置标定微操作机器人坐标系的新方法。将单模光纤输出的准球面波与平面波干涉产生牛顿环,根据牛顿环在二维标尺上的位置确定光纤输出端的二维坐标。与平面波垂直的另一路平面波与准球面波干涉以确定光纤输出端的第三维坐标。将光纤夹持在被标定部件上,分别标定各部件的机械轴所确定的坐标系与标尺坐标系的变换矩阵后,由矩阵运算得到各坐标系之间的关系。测量精度为亚微米量级。标定时,图像质量不受显微物镜景深的限制。A novel method for calibrating micro-manipulators with the center position of Newton tings was presented. A quasispherical wave that was output by a single mode fiber interfered with a plane wave, then the Newton rings were appeared. The 2D coordinates of the fiber＇ s output spot were measured from the position of Newton rings on the 2D scale plate. The third dimensional coordinate was measured by the method that another plane wave vertical to the plane wave interfered with the same quasi-spherical wave. After the fiber was held on the tested part, the transfer matrices from each part to the ruler were calibrated, and then the relations among the four coordinates were calculated from the matrixes. The measurement accuracy was sub-micron grade. The quantity of images was not affected by the depth of field when the system was calibrated.

关 键 词：微操作机器人 标定 单模光纤 牛顿环 二维标尺 

分 类 号：TN253[电子电信—物理电子学]