粉末溅射ZnO薄膜酒敏元件  

Powder sputtered ZnO thin-film alcohol sensor

作　　者：周磊[1] 邢建平[1] 周晨[1] 洪德斌[1] 裘南畹[2] 

机构地区：[1]山东大学信息科学与工程学院,山东济南250100 [2]山东大学物理与微电子学院,山东济南250100

出　　处：《山东大学学报（工学版）》2007年第1期111-114,共4页Journal of Shandong University（Engineering Science）

基　　金：国家自然科学基金项目(60372036);山东火炬计划项目(111600/04040214)

摘　　要：针对金属氧化物薄膜气敏元件传统制造工艺中存在的掺杂不稳问题,开发了一种实用化的ZnO薄膜气敏基材料.采用粉末溅射法研制ZnO:1%CeO2薄膜,利用衬底Al2O3与ZnO晶体均为六方结构的特点,选择适当溅射参数研制出薄膜气敏元件,同时通过悬挂芯片双点焊工艺,使元件更加小型化.长期检测结果表明,此类元件气敏特性和稳定性良好,适合进一步推广应用.For the instability of metal oxide thin film gas sensor in doping process, a practical ZnO thin-film gas sensing basic material was developed. The ZnO/1% CeO2 thin-film was prepared by adopting the powder sputtering method. Based on the characteristic of the hexabedron crystal of substrate A1203 and ZnO, a thin-film gas sensor was developed by selecting proper sputtered parameters. A micro miniature pensile gas sensor was acquired by double point welding of the chip and wiring pole techniques. Long-term experiment resuits show that the favorable gas sensing character and stability of the element is suitable for further application.

关 键 词：粉末溅射 薄膜 双点焊 

分 类 号：TN305.94[电子电信—物理电子学]