PMMA薄膜nm尺度下表面电荷的制备和观察  

Preparation and Observation of Surface Charges on PMMA Film in Micro-Nanometer Scale

作　　者：赵慧斌[1] 任权[1] 韩立[1] 

机构地区：[1]中国科学院电工研究所

出　　处：《微纳电子技术》2007年第6期324-327,共4页Micronanoelectronic Technology

摘　　要：利用扫描探针显微镜(SPM)的导电探针在PMMA薄膜表面μm/nm尺度下通过摩擦方式产生了电荷,并用静电力显微镜(EFM)对生成的电荷进行了观察。讨论了生成电荷的极性、数量、区域大小与摩擦过程中探针加工速度、所加电压大小及正负之间的关系:产生电荷的极性与摩擦过程中针尖所加电压的正负保持一致,且所加电压越大,产生电荷的区域和面积越大。但相同情况下,PMMA表面出现的正电荷区域和数量要多于负电荷;针尖带电摩擦时,摩擦速度越快,产生电荷的数量和区域也随之减小。为探索PMMA表面电荷生成规律及生成机理提供了一种新的途径。Surface charges in micro-nanometer scale were prepared on the surface of polymethyl methacrylate （PMMA） films by carving the surface with conductive SPM probe, and these generated charges were observed with electrostatic field microscope （EFM） The relationships among the polarity, quantities, areas of the surface charges and the voltage on tip, fabrication speed were discussed： Charges polarity is in accordance with potential on the tip while carving the surface; with the increase of bias voltage on tip, the charges quantities and areas increase; with the increase of friction speed of tip, the quantities and areas of the charges areas decrease. The results provide a new way for studying the regularity and mechanics of surface charges generation on PMMA film.

关 键 词：聚甲基丙烯酸甲酯 表面电荷 扫描探针显微镜 静电力显微镜 

分 类 号：O484.42[理学—固体物理]