用于超精表面损伤检测的微探针系统设计与测试  

Design and Test of the Cantilever-tip System for Superfinish Surface Scratch Detection

作　　者：林浩山[1] 李玉和[1] 王东生[1] 

机构地区：[1]清华大学 精密仪器与机械学系,北京100084

出　　处：《新技术新工艺》2007年第6期33-34,共2页New Technology & New Process

基　　金：973国家重大基础研究项目(2003CB716201)

摘　　要：电子产品高集成度与高性能化的发展,对超精表面微观形貌轮廓纳米尺度微裂纹损伤检测要求越来越高。设计灵敏度高、重现性好、响应快速的微探针系统是实现纳米尺度分辨率、大视场损伤检测的关键部件之一。文中对设计的微探针系统受力阻尼谐振过程进行了分析,给出共振频率的测试方法。在此基础上进行了共振频率测试对比试验,并对微探针振动进行了测试。试验结果表明,设计的微探针系统满足检测性能要求。With the high-density and high performance develop- ment on electronic products,non-traumatic superfinish surface a- bout the scratch at nanoscale is expected more and more.It's one of the key parts to implement the nanometer resolution and large field range scratch detection that how to design the highly sensi- tive and quickly response and better recurrence cantilever-tip sys- tem.The study of the motion of a harmonic oscillation with damping of the eantilever-tip can be done in this paper,the tes- ting method of its resonant frequency is given.Based on the tes- ting method,contrastive experiments are set up to testify the res- onant frequency with damping of the cantilever-tip.The tip vi- bration is also tested.The results show that the cantilever-tip system is satisfied performance requirements for superfinish sur- face scratch detection.

关 键 词：光学测量 微探针 共振频率 

分 类 号：TH74[机械工程—光学工程]