基于棋盘光栅Ronchi检验法的微变液面测量  

Profile measurement for micro-varying liquid surface based on chessboard grating Ronchi test

作　　者：张明照[1] 王伯雄[1] 罗秀芝[1] 刘国忠[1] 胡柏青[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《光学精密工程》2007年第6期812-817,共6页Optics and Precision Engineering

基　　金：科技部中德科技合作重点项目(No.2003DFB00028)

摘　　要：提出了基于棋盘光栅Ronchi检验法的微变表面形貌测量方法,可同时测量被测表面形貌两个正交方向的斜率,因而可通过一幅变形棋盘光栅图重构被测表面形貌。使用取微分极值的方法可简单有效地实现变形棋盘光栅图两个正交方向信息的分离和提取。根据所提出的测量方法和数据提取算法建立了微变表面形貌测量系统并对静态和动态表面形貌进行了测量。结果表明,所建立系统的分辨率<0.1μm,测量范围>50μm,符合有关研究中对微变液面的测量需求。Based on chessboard grating Ronchi test,a micro-varying surface profile measurement method was proposed, which can measure the slopes in two orthogonal directions of the surface simultaneously for reconstructing the surface profile by only one deformed chessboard grating pattern. Information of the two orthogonal directions in deformed chessboard grating patterns can be effectively separated and extracted through simple differential operation and extremum tracking. Based on the proposed method and the data extraction algorithm, a micro-varying surface profile measurement system was built up to measure a stationary surface and a varying surface. The results show that the system meets the measurement need of micro-varying liquid surface in some research fields with its resolution less than 0.1μm and measurement range more than 50μm.

关 键 词：棋盘光栅 Ronchi检验法 表面形貌 图像处理 

分 类 号：O436.1[机械工程—光学工程] TB92[理学—光学]