尺蠖型压电直线驱动器的动态特性  

Dynamic performance of inchworm-type piezoelectric linear actuator

作　　者：赵宏伟[1] 吴博达[1] 华顺明[1] 杨志刚[1] 程光明[1] 曲兴田[1] 

机构地区：[1]吉林大学机械科学与工程学院,吉林长春130025

出　　处：《光学精密工程》2007年第6期873-877,共5页Optics and Precision Engineering

基　　金：国家"863"计划资助项目(No.2002AA423150);国家自然科学基金资助项目(No.50475010);高等学校博士点专项科研基金资助项目(No.20050183020)

摘　　要：分析了尺蠖型压电直线驱动器的结构原理,建立了驱动器系统动力学模型。对驱动器定子进行了模态分析,并对分析结果进行了评价。对设计开发的驱动器样机输出特性进行了试验测试,实验测得驱动器单步输出位移稳定可靠,100 V驱动电压下,单步输出位移为9.8μm。对驱动器直线动子的速度、加速度特性进行了测试,依据速度、加速度信号进一步分析了驱动器的动态响应特性。实验结果表明,所开发的驱动器具有动态特性好、运动稳定等优点。The structure and working principle of a inchworm-type piezoelectric linear actuator are analyzed, and the mechanical system dynamic modal of the actuator is established. Based on the analysis of the actuator＇s stator, the output performance of proposed actuator is analyzed,experimental results show that the output displacement of the actuator is stable, and the displacement for single step is 9.8 μm when the actuating voltage is 100 V. The velocity and acceleration properties of the linear actuator are tested. According to the testing results, the dynamic response performance of the actuator is analyzed deeply. The experimental results show that the proposed piezoelectric linear actuator has good dynamic performance and motion stability.

关 键 词：压电驱动器 尺蠖运动 精密定位 直线运动 动态特性 

分 类 号：TM359.4[电气工程—电机] TN384[电子电信—物理电子学]