多层弯曲磁芯微执行器的吸合现象  

Pull-in Phenomena of Multilevel Meander Magnetic Microactuator

作　　者：郭永献[1] 贾建援[1] 张大兴[1] 梁丽萍[2] 

机构地区：[1]西安电子科技大学机电工程学院,西安710071 [2]航天长征火箭技术有限公司,北京100076

出　　处：《纳米技术与精密工程》2007年第2期98-101,共4页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(10476019)

摘　　要：从多层弯曲磁芯微执行器的模型及原理出发,应用静磁执行器的吸合方程,分别用磁动势控制模型和磁通控制模型对多层弯曲磁芯微执行器的吸合现象进行了理论分析.计算及仿真结果表明:多层弯曲磁芯微执行器存在临界吸合角度,磁动势控制模型的临界吸合角度约为其最大旋转角度的44%;磁通控制模型的临界吸合角度约为其最大旋转角度的72.35%.磁动势控制实验结果与理论计算值误差约为8%.Based on the magnetic pull-in equations, pull-in phenomena of the ideal mode were analyzed using the magneto-motive-force （MMF）-controlled model and the flux-controlled model. Calculation and simulation results suggest that there is critical pull-in angle in multilevel meander magnetic microactuator： under the con- dition of the MMF-controlled model, the critical pull-in angle is about 44% of the maxim rotating angle of the system; while under the condition of the flux-controlled model, the ratio of the critical pull-in angle to the maxim rotating angle is 72.35 %. The error of the critical pull-in angle between MMF-controlled experimental result and the theoretical one is only about 8 %.

关 键 词：多层弯曲磁芯微执行器 吸合现象 磁动势 MEMS移相器 

分 类 号：TN42[电子电信—微电子学与固体电子学]