基于EFAB工艺的可植入RFID天线设计  

Antenna design of implantable RFID based on EFAB technology

作　　者：郭东辉[1] 陈华君[1] 

机构地区：[1]厦门大学物理系

出　　处：《福州大学学报（自然科学版）》2007年第3期409-414,共6页Journal of Fuzhou University(Natural Science Edition)

基　　金：福建省自然科学基金资助项目(A0410007);国家人事部留学人员创业基金资助项目

摘　　要：可植入RFID目前已被广泛应用于动物识别和生物医学应用等领域,为了保证RFID在植入体内后避免引起动物或人体的不适,小尺寸和高灵敏度是可植入RFID设计的基本要求.首先说明可植入RFID天线设计的基本参数要求,然后介绍一种标准的MEMS工艺——EFAB工艺,并利用该工艺标准的设计规则进行可植入RFID天线的结构设计,最后通过仿真验证该线圈天线符合可植入RFID的工作要求.This paper is to present a new technology for antenna design of implantable RFID. As implantable RFID are normally used as active devices for animal identification, biologic medical sensor, and so on, small size and high working efficiency are the basic requirement for their implant without bodily discomfort. Here, we introduce a new MEMS process - EFAB process, and use it to design a micro -coil antenna for implantable RFID. With its design rules and electronic parameters, our simulation results show that the micro - coil antenna meets requirement of implantable RFID.

关 键 词：MEMS工艺 EFAB工艺 可植入RFID 微型线圈天线 

分 类 号：TN820.12[电子电信—信息与通信工程] TN821.4