乙烯基三甲基硅烷等离子体聚合物膜的结构与性能  

THE STRUCTURE AND PROPERTIES OF PLASMA POLY MERIZED VINYLTRIMETHYLSILANE

作　　者：颜文革[1] 陈捷[1] 卢丽珍[1] 王世才[1] 

机构地区：[1]中国科学院长春应用化学研究所

出　　处：《高分子学报》1990年第1期36-44,共9页Acta Polymerica Sinica

基　　金：国家自然科学基金

摘　　要：采用外部电极电容耦合高频等离子体装置对乙烯基三甲基硅烷(VTMS)进行等离子体聚合。用IR、XPS、PGC/MS、X-ray、ESR和元素分析等方法对聚合物结构进行表征,并推断聚合反应历程。应用TG研究聚合物的热性能。通过X-ray证实聚合物为非晶结构。在无添加气体存在时聚合,XPS测试结果表明产物中有氧嵌入,且聚合物的C/Si比总的说来比单体的C/Si比低。TG的测试结果表明聚合物膜具有优良的热稳定性。In a capacitively coupled discharge witih external electrodes, vinyltrimethylsilane (VTMS) was polymerized. The polymer structure was characterized with IR, XPS, PGC/MS, X-ray, ESR and elemental analysis. A polymerization mechanism was speculated. The thermal property of the polymer was studied by means of TG analysis. The polymer is found to be amorphous through X-ray study. XPS examination indicates that oxygen is incorporated into the polymer chain when plasma gases are not added, and the C/Si ratios of polymer are lower than that of polymer in general.TG study indicates that the polymer has better thermal stability.

关 键 词：有机硅化合物 等离子体聚合 VTMS 

分 类 号：O634.41[理学—高分子化学]