大数值孔径自聚焦平面微透镜列阵研究  

A STUDY ON SEIF-FOCUSING PLANAR MICROLENS ARRAY WITH LARGE NA

作　　者：刘德森[1] 高应俊[1] 覃亚丽 阎国安[1] 宋辉[1] 姚胜利[1] 高凤[1] 孔庆芬 孔金荣 朱传贵[1] 梅锁海[1] 

机构地区：[1]中国科学院西安光机所

出　　处：《高速摄影与光子学》1990年第3期209-217,共9页

基　　金：国家高技术和自然科学基金

摘　　要：采用离子交换工艺,在PS—1玻璃基片上制作自聚焦平面微透镜列阵,由于窗口区凸起,数值孔径高达0.58。本文还对窗口凸起的透镜特性和窗口直径对折射率分布的影响进行了理论分析,得到了有益结果。最后对样品的光学特性进行了讨论。A self-focusing planar microlens array has been made in a glass substrate PS-1 by ion-exchange technique, and because of the swelled structure near the window of the diffusion mask, the NA is as large as 0.58. The theratical analysis on the properties of the microlens with swelled structure and the influence of the mask window size on the index distribution are given in this paper, and useful results are presented. At last we discussed the optical proporties of the lens samples.

关 键 词：平面透镜 自聚焦 数值孔径 

分 类 号：TB811.3[一般工业技术—摄影技术]