微细笔直写聚合物条形光波导的研究  

Direct writing of polymer optical waveguides by micro-pen

作　　者：李金洪[1] 董林红[1] 王泽敏[1] 许德胜[1] 朱大庆[1] 曾晓雁[1] 

机构地区：[1]华中科技大学光电子科学与工程学院武汉光电国家实验室,武汉430074

出　　处：《应用光学》2007年第2期236-239,共4页Journal of Applied Optics

基　　金：国家高技术研究发展计划"863"(2005AA311030);国家自然科学基金(50575086)

摘　　要：提出一种采用微细笔直写技术直写聚合物光波导的简便方法,利用该技术成功直写出了氟化聚酰胺条形光波导,并着重研究了气体压力和直写速度对波导宽度的影响规律。实验结果表明:直写获得的条形波导的边缘整齐、表面光滑,而且不存在小孔等缺陷或杂质。当其他工艺参数不变的情况下,波导宽度随着气体压力的增加而增大,随着直写速度的增大而减小。微细笔直写获得的条形光波导成功地实现了通光,在波长为1 550 nm处的最小传输损耗为0.59 dB/cm。A simple method of direct-writing polymer waveguides by micro-pen is reported. The fluorinated polyamide strip waveguide were fabricated successfully by this technology, and the relationship of the gas pressure and writing speed with the waveguide width were established. Experimental results show that the direct-writing method can fabricate high quality waveguides. The waveguides have the merits of straight edge, smooth surface, no ventage and impurity. Keeping other parameters unchanged, the waveguide width increases with the increase of the gas pressure, but decreases with the increase of the direct-writing speed. The waveguides successfully achieve the function of guiding the light. The minimum propagation loss measured is 0.59 dB/cm at 1 550 nm.

关 键 词：集成光学 聚合物光波导 直写技术 微细笔 

分 类 号：TN256[电子电信—物理电子学]