激光调阻预置式变速光刻控制  

Laser Trimming Resistance Pre-trimming Settings and Speed Variation Laser Trimming Control

作　　者：孙继凤[1] 汤建华[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033

出　　处：《光机电信息》2007年第1期21-25,共5页OME Information

基　　金：国家高技术产业化光电子专项资助项目(2002055);长春市科技攻关计划资助项目(02-130G22)

摘　　要：全自动激光调阻机是各种薄、厚膜片式电阻的工业化专用生产设备,提高调阻性能是提升设备生产力,降低生产成本,节能增效的主要途径。因此,在原系统基础上对激光调阻中光束定向控制系统进行改进设计,以先验知识为基础,构造预置、简单变速、实时变速等光刻控制模型,得到预置式变速光刻控制方法。它能根据不同的精度、速度要求和片阻初值偏差进行优化决策,实现在激光粗调电阻时,采用快速光刻;在激光精调电阻时,采用慢速光刻。这样不仅动态改变了片阻的光刻阻值变化率,提高了调阻精度,而且缩短了粗调光刻时间,提高了调阻速度,从整体上提高了激光调阻性能。Full automatic laser trimming resistance system is a special industrial device used to produce all kinds of thin film and thick film chip resistors. Improving the trimming capability of the device is the best effective way to improve the productivity and low the cost. So a new improved laser trimming control method has been designed based on the original laser beam position control system. Pre-trimming settings control, simple speed variation control and real-time speed variation control have been constructed by the trimming knowledge, and a pre-trimming settings and speed variation laser trimming control method have been got. It can optimize decision-making according to the trimming precision, trimming speed and resistance initial value warp, and realize that quick trimming speed is adopted during the laser rough trimming, while the slow trimming speed is adopted during the laser fine trimming. The method not only varies the resistance variation rate dynamically to improve the trimming precision, but also shortens the rough trimming time to improve the trimming speed. Hence, the trimming capability of the device is whole improved.

关 键 词：激光调阻 预置式控制 变速控制 调阻速度 调阻精度 

分 类 号：TN249[电子电信—物理电子学]