低成本燃烧合成氮化硅的工艺研究  

Study on Processing of Silicon Nitride by Combustion Synthesis at Low Cost

作　　者：陈义祥[1] 林志明[1] 杨筠[1] 李江涛[1] 

机构地区：[1]中国科学院理化技术研究所

出　　处：《稀有金属材料与工程》2007年第7期1267-1271,共5页Rare Metal Materials and Engineering

基　　金：国家自然科学基金资助项目(50372074)

摘　　要：采用硅/氯化铵为反应剂,在2MPa的较低氮气压力实现了燃烧合成氮化硅。研究结果表明,对硅/氯化铵反应剂进行机械活化处理,可以有效提高反应剂活性,从而促进硅粉在低氮气压力下的快速燃烧氮化。随着原料中氯化铵加入量的增加,产物中α相氮化硅含量逐步升高,最高可达90.6%(质量分数)。应用简单的分析模型计算了料坯中心与表面的温度差,结果表明,以热辐射为主的散热方式导致的粉坯内外温度差是决定产物中不同部位的相组成和形貌产生差异的原因。模型计算和实验检测的结果都证明了这种温度差异的存在。The feasibility of Mechanical-Activation （MA） assisted combustion synthesis of silicon nitride was demonstrated by using silicon/ammonia chloride as reactants under nitrogen pressure below 2 MPa. The MA treatment enhances the reactivity significantly and promotes the nitridation of silicon effectively. The increase of ammonia chloride content in the green mixture stimulates the increase of α-silicon nitride content in the product. Silicon nitride with α-phase content up to 90.6 wt% was obtained. The temperature difference between the centre and the edge of the sample was calculated by a simple analytical model. Such a temperature difference was caused mainly by the heat loss due to heat radiation, responsible for the differences in phase composition and morphology of the products.

关 键 词：机械活化 氮化硅 燃烧合成 

分 类 号：TQ127.2[化学工程—无机化工]