1×16微机电系统光纤连接器阵列的研制  

Development of 1×16 MEMS optical fiber connector array

作　　者：蔡玉丽[1] 丁桂甫[1] 戴旭涵[1] 张丹[1] 

机构地区：[1]上海交通大学微纳科学技术研究院微米/纳米加工技术国家重点实验室薄膜与微细技术教育部重点实验室,上海200030

出　　处：《传感器与微系统》2007年第7期87-88,92,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(10377009);上海市光科技专项研究项目(DZ46105008)

摘　　要：一种基于MEMS工艺的硅基阵列化光纤连接器,具有微型化、可集成制造和重复性好等特点。每个单元利用硅V型槽与其上集成制造的电沉积流线型曲面金属镍盖板的组合形成了方便光纤插拔的喇叭口形导引通道和可实现光纤定位及精确自对准的双悬臂梁形夹持通道。采用Ansys软件对双悬臂梁结构在不同的厚度与翘曲位移条件下对光纤产生的压制力进行建模与仿真,并将其与理论分析结果进行比较。成功地将单元扩展成1×16阵列,体积仅为6.8mm×15.2mm×0.5mm,各单元插入损耗约为0.3 dB。A silicon based optical fiber connector array using MEMS technology is presented. The devices are miniaturized, integrated manufacturable and reproducible. Combining the silicon V-shaped groove and the electroplated streamlined nickel cover plate, bell-mouthed crimping channel for easy insertion and double cantilever beams clamping channel for precise position and self-splicing are formed in each unit. Commercial ansys software is used to model and simulate the suppress force of the beams under different thickness and displacement conditions. The results are compared with the theoretical analysis. Array （ 1 × 6） is successfully extended. The volume is only 6.8 mm ×15.2 mm×0.5 mm and the insertion loss of each unit is about 0.3 dB.

关 键 词：光学器件 光纤连接器阵列 微机电系统 集成制造 

分 类 号：TN253[电子电信—物理电子学] TN929.11