Influence of Ar/N_2 Flow Rate on Structure and Property for TaN/NbN Multilayered Coatings  

作　　者：Xuehua ZHANG Yuanbin KANG Sipeng LIU Qiang LI Ying YANG Xiangyun DENG Dejun LI 

机构地区：[1]College of Physics and Electronic Information Science, Tianjin Normal University, Tianjin 300074, China

出　　处：《Journal of Materials Science & Technology》2007年第4期461-464,共4页材料科学技术（英文版）

摘　　要：TaN/NbN multilayered coatings with nanoscale bilayer periods were synthesized at different Ar/N2 flow rates by RF （radio frequency） magnetron sputtering. XRD （X-ray diffraction） and Nano Indenter System were employed to investigate the influence of Ar/N2 flow rate （FAr：FN2） on microstructure and mechanical properties of the coatings. The low-angle XRD pattern indicated a well-defined composition modulation and layer structure of the multilayered coating. All multilayered coatings almost revealed higher hardness than the rule-of-mixtures value of monolithic TaN and NbN coatings. At FAr：FN2=10, the multilayered coating possessed desirable hardness, elastic modulus, internal stress, and fracture resistance, compared with ones synthesized at other Ar/N2 flow rates. The layered structure with strong mixture of TaN （110）, （111）, （200） and Nb2N （101）textures should be related to the enhanced mechanical properties.TaN/NbN multilayered coatings with nanoscale bilayer periods were synthesized at different Ar/N2 flow rates by RF （radio frequency） magnetron sputtering. XRD （X-ray diffraction） and Nano Indenter System were employed to investigate the influence of Ar/N2 flow rate （FAr：FN2） on microstructure and mechanical properties of the coatings. The low-angle XRD pattern indicated a well-defined composition modulation and layer structure of the multilayered coating. All multilayered coatings almost revealed higher hardness than the rule-of-mixtures value of monolithic TaN and NbN coatings. At FAr：FN2=10, the multilayered coating possessed desirable hardness, elastic modulus, internal stress, and fracture resistance, compared with ones synthesized at other Ar/N2 flow rates. The layered structure with strong mixture of TaN （110）, （111）, （200） and Nb2N （101）textures should be related to the enhanced mechanical properties.

关 键 词：RF magnetron sputtering TaN/NbN multilayered coatings Nanoscale  mechnical properties 

分 类 号：TS912.9[轻工技术与工程]