Structure and Mechanical Performance of Nitrogen Doped Diamond-like Carbon Films  

作　　者：Huayu ZHANG Liang-xue LIU Yulei WANG Hongtao MA Fanxin LIU 

机构地区：[1]Harbin Institute of Technology Shenzhen Graduate School, Shenzhen518055, China [2]SAE Technologies Development （Dongguan） Co., Ltd., Dongguan 523087, China

出　　处：《Journal of Materials Science & Technology》2007年第4期491-494,共4页材料科学技术（英文版）

摘　　要：Nitrogen doped diamond-like carbon （DLC：N） films were prepared by electron cyclotron resonance chemical vapor deposition （ECR-CVD） on polycrystalline Si chips. Film thickness is about 50 nm. Auger electron spectroscopy （AES） was used to evaluate nitrogen content, and increasing N2 flow improved N content from 0 to 7.6%. Raman and X-ray photoelectron spectroscopy （XPS） analysis results reveal CN-sp^3C and N-sp^2C structure. With increasing the N2 flow, sp^3C decreases from 73.74% down to 42.66%, and so does N-sp^3C from 68.04% down to 20.23%. The hardness decreases from 29.18 GPa down to 19.74 GPa, and the Young＇s modulus from 193.03 GPa down to 144.52 GPa.Nitrogen doped diamond-like carbon （DLC：N） films were prepared by electron cyclotron resonance chemical vapor deposition （ECR-CVD） on polycrystalline Si chips. Film thickness is about 50 nm. Auger electron spectroscopy （AES） was used to evaluate nitrogen content, and increasing N2 flow improved N content from 0 to 7.6%. Raman and X-ray photoelectron spectroscopy （XPS） analysis results reveal CN-sp^3C and N-sp^2C structure. With increasing the N2 flow, sp^3C decreases from 73.74% down to 42.66%, and so does N-sp^3C from 68.04% down to 20.23%. The hardness decreases from 29.18 GPa down to 19.74 GPa, and the Young＇s modulus from 193.03 GPa down to 144.52 GPa.

关 键 词：Nitrogen doped diamond-like carbon films ECR-CVD STRUCTURE Mechanical performance 

分 类 号：TB43[一般工业技术]