真空管道TiN膜热出气率实验研究  

Thermal outgassing rate of the vacuum pipe's TiN coating

作　　者：王勇[1] 张耀锋[1] 尉伟[1] 范乐[1] 王建平[1] 耿会平[1] 

机构地区：[1]中国科学技术大学国家同步辐射实验室,安徽合肥230029

出　　处：《真空》2007年第4期59-61,共3页Vacuum

基　　金：国家自然科学基金(10245002)资助项目

摘　　要：简要叙述了小孔流量法测量材料出气率实验的原理和实验装置,给出了不锈钢溅射镀TiN膜在不同情况下的热出气率,并对影响不锈钢溅射镀TiN膜热出气率情况的各种因素进行了分析,为使用溅射镀TiN膜表面处理的储存环真空室的设计提供了依据。Describes briefly the working principle and experimental setup of measuring the thermal outgassing rate by orifice throughput method. Then, the thermal outgassing rates of stainless steel during TiN coating sputtering under different conditions are given, and various influencing factors on the outgassing rates are analyzed. The results can provide some experimental basis for the design of the vacuum chambers of storage ring.

关 键 词：热出气率 TIN膜 真空材料 表面处理 

分 类 号：TN305.8[电子电信—物理电子学] TB771[一般工业技术—真空技术]