PZT压电厚膜的发展及其应用  

DEVELOPMENT AND APPLICATIONS OF PZT PIEZOELECTRIC THICK FILM

作　　者：董金美[1] 沈建兴[1] 李传山[1] 张雷[1] 

机构地区：[1]山东轻工业学院,济南250353

出　　处：《中国陶瓷》2007年第8期3-6,共4页China Ceramics

摘　　要：PZT压电厚膜材料是20世纪90年代发展起来的一种新型功能材料,它兼顾了块体材料和薄膜材料的优点,具有良好的压电、介电和热释电性能。简述了PZT压电厚膜的国内外研究进展,对PZT压电厚膜的制备方法做了简短的介绍,并对其改性研究做了较为详细的总结,最后,阐述了PZT压电厚膜在国内外的应用并展望了其前景。PZT piezoelectric thick film material is a kind of a new pattern functional material since 90＇s in 20 centuries. It has the advantages both body material and the thin-film material, and has better piezoelectricity, dielectric and pyroelectric properties. In the article, the research development and the preparation methods of PZT piezoelectric thick-film were reviewed, and the preparation development of that was summarized in detail. At last, the application and prospect home and abroad of PZT piezoelectric thick film material were introduced.

关 键 词：PZT 压电厚膜 研究进展 

分 类 号：TN452[电子电信—微电子学与固体电子学]