电子束光刻制造软刻蚀用母板的研究  

Fabrication of the Master for Soft Lithography by Electron Beam Lithography

作　　者：卢文娟[1] 张玉林[1] 孔祥东[2] 郝惠娟[1] 

机构地区：[1]山东大学控制学院电子束研究所,山东济南250061 [2]东营职业学院,山东东营257091

出　　处：《光电子．激光》2007年第7期788-791,共4页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金重大研究计划资助项目(90307003);国家自然科学基金资助项目(10572078);山东省自然科学基金资助项目(Y2003G03);山东省科技攻关计划基金资助项目(022090105)

摘　　要：使用通用电子束曝光机,采用一种新的电子束微三维加工的重复增量扫描方式进行曝光实验,显影后得到轮廓清晰的微三维结构,以此为制作弹性印章的母模板,经硅烷化后可用来制作弹性印章,得到弹性印章后便可再利用软刻蚀相关技术进行微图形的复制。曝光实验的结论表明采用电子束重复增量扫描方式可用来制作微三维弹性印章的母版。new three-dimensional micromachining manner of overlapped increment scanning of electron beam is adopted,and exposure experiments are made by universal electron beam exposure systems. After development, the distinct threedimensional microstmctures are obtained and can be used as the master of elastic stamps which are the key of soft lithography,so elastic stamps can be fabricated after sitanization. Then,these elastic stamps can be used to replicate micropattems with relevant technology of SL. The results of exposure experiments show that overlapped increment scanning manner of electron beam can be applied to fabricating the motherboards of micro-3D elastic stamps.

关 键 词：电子束光刻 软刻蚀技术 母板 弹性印章 微三维加工 

分 类 号：TN305.7[电子电信—物理电子学]