磷酸盐激光玻璃的化学机械抛光  

Chemical-Mechanical Polishing of Phosphate Laser Glass

作　　者：张宝安[1] 朱健强[1] 樊全堂[1] 

机构地区：[1]中国科学院上海光学精密机械研究所,上海201800

出　　处：《中国激光》2007年第8期1151-1154,共4页Chinese Journal of Lasers

摘　　要：从磷酸盐激光玻璃的成分和结构出发,分析了其化学机械抛光(CMP)机制.通过实验验证了磷酸盐激光玻璃对抛光液pH值具有较强的选择性,在微酸性和中性条件下磷酸盐激光玻璃具有较高的抛光效率,在抛光液中添加pH值调节添加剂会保持抛光环境的酸碱性从而影响抛光效率和抛光质量.通过对pH值和抛光剂浓度的控制获得了均方根(RMS)优于0.6 nm的磷酸盐激光玻璃的超光滑表面.　Embarked from the component and structure of phosphate laser glass,its chemical-mechanical polishing（CMP） mechanism is analyzed.Through experiment,it is demonstrated that the phosphate laser glass has strong selectivity to polishing solution pH value and has high polishing efficiency under slight acidic or neutral condition.By adding pH value adjustment additive in the polishing slurry,the acidity of polishing environment is maintained,as well as the polishing efficiency and polishing quality.An ultra smooth surface of phosphate laser glass with root-mean-square（RMS） 0.6 nm is obtained,through controlling the pH value and density of polishing solution.

关 键 词：材料 激光玻璃 光学加工 抛光液 

分 类 号：TN244[电子电信—物理电子学]